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ABL1500空气轴承直线平台非常适合尖端制造业，特别是在半导体和数据存储行业，要求定位公差超越传统滚珠丝杠和机械轴承定位系统的能力的场合。ABL1500空气轴承平台专为满足这些需求而设计，具有完全主动预紧力，极高的刚性和优秀的几何特性。

Mechanical Specifications

Model			ABL15005	ABL15010	ABL15020
Travel			50 mm	100 mm	200 mm
Accuracy(1)	LN	HALAR	±0.2 μm	±0.2 μm	±0.4 μm
		Standard	±1.0 μm	±2.0 μm	±5.0 μm
	LT	HALAR	±0.3 μm	±0.3 μm	±0.5 μm
		Standard	±2.0 μm	±4.0 μm	±8.0 μm
Repeatability (Bidirectional)(1)	LN		±0.05 μm	±0.05 μm	±0.1 μm
	LT		±0.1 μm	±0.2 μm
Straightness(1)			±0.25 μm	±0.4 μm	±0.5 μm
Flatness(1)			±0.25 μm	±0.4 μm	±0.5 μm
Pitch			±0.5 arc sec	±1 arc sec	±2 arc sec
Roll			±0.5 arc sec	±1 arc sec	±2 arc sec
Yaw			±0.5 arc sec	±1 arc sec	±2 arc sec
Maximum Speed			2 m/s
Maximum Acceleration			2 g (No Load)
Maximum Force (Continuous)			93.6 N
Load Capacity(2)	Horizontal		35 kg
	Side		25 kg
Operating Pressure			80 psi ±5 psig
Air Consumption			24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar)
Moving Mass (No Load)			5.1 kg
Stage Mass			14.7 kg	16.0 kg	18.6 kg
Material			Aluminum
MTBF (Mean Time Between Failure)			30,000 Hours

1. Certified with each stage.
2. Axis orientation for on-axis loading is listed.
3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
6. For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
   

Model			ABL15030	ABL15040	ABL15050
Travel			300 mm	400 mm	500 mm
Accuracy(1)	LN	HALAR	±0.4 μm	±0.5 μm	±0.5 μm
		Standard	±5.0 μm	±5.0 μm	±5.0 μm
	LT	HALAR	±0.5 μm	±0.6 μm	±0.6 μm
		Standard	±12.0 μm	±16.0 μm	±20.0 μm
Repeatability (Bidirectional)(1)	LN		±0.15 μm	±0.2 μm
	LT		±0.2 μm	±0.3 μm
Straightness(1)			±0.75 μm	±1.5 μm	±2.0 μm
Flatness(1)			±0.75 μm	±1.5 μm	±2.0 μm
Pitch			±3 arc sec	±4 arc sec	±5 arc sec
Roll			±3 arc sec	±4 arc sec	±5 arc sec
Yaw			±3 arc sec	±4 arc sec	±5 arc sec
Maximum Speed			2 m/s
Maximum Acceleration			2 g (No Load)
Maximum Force (Continuous)			93.6 N
Load Capacity(2)	Horizontal		35 kg
	Side		25 kg
Operating Pressure			80 psi ±5 psig
Air Consumption			24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar)
Moving Mass (No Load)			5.1 kg
Stage Mass			21.3 kg	23.9 kg	26.5 kg
Material			Aluminum
MTBF (Mean Time Between Failure)			30,000 Hours

1. Certified with each stage.
2. Axis orientation for on-axis loading is listed.
3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
6. For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.

Electrical Specifications

Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage	up to 80 VDC
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller

Multi-Axis	A3200	Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
	Ensemble	Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis	Soloist	Soloist MP/Soloist CP/Soloist HLe

• ABL1500Spec
• ABL1500Spec-2

Dimensions

• ABL1500

Ordering Information

Ordering Example

ABL15

010

-M

-10

-NC

-LN10AS

-SINGLE-CMS

Ordering Options

Series	Travel	Mounting and Grid Pattern	Motor	Limits	Linear Encoder	Options
ABL15	005 010 020 030 040 050	-M	-10	-NC	-LTnnAS -LTnnX50 -LNnnAS	-SINGLE-CMS -XY-CMS

ABL1500 Series Linear Air-Bearing Stage

Option	Description
ABL15005	50 mm (2 in) travel linear air-bearing stage with linear motor and limits
ABL15010	100 mm (4 in) travel linear air-bearing stage with linear motor and limits
ABL15020	200 mm (8 in) travel linear air-bearing stage with linear motor and limits
ABL15030	300 mm (12 in) travel linear air-bearing stage with linear motor and limits
ABL15040	400 mm (16 in) travel linear air-bearing stage with linear motor and limits
ABL15050	500 mm (20 in) travel linear air-bearing stage with linear motor and limits

Mounting and Grid Pattern

Option	Description
-M	Metric dimension mounting pattern and holes

Motor

Option	Description
-10	Brushless linear motor (BLMC-192-A)

Limits

Option	Description
-NC	Normally-closed end of travel limit switches (standard)

Standard Linear Encoders

Option	Description
-LT05AS	Linear encoder for ABL15005; amplified sine output
-LT10AS	Linear encoder for ABL15010; amplified sine output
-LT20AS	Linear encoder for ABL15020; amplified sine output
-LT30AS	Linear encoder for ABL15030; amplified sine output
-LT40AS	Linear encoder for ABL15040; amplified sine output
-LT50AS	Linear encoder for ABL15050; amplified sine output
-LT05X50	Linear encoder for ABL15005; 0.1 micron line driver output
-LT10X50	Linear encoder for ABL15010; 0.1 micron line driver output
-LT20X50	Linear encoder for ABL15020; 0.1 micron line driver output
-LT30X50	Linear encoder for ABL15030; 0.1 micron line driver output
-LT40X50	Linear encoder for ABL15040; 0.1 micron line driver output
-LT50X50	Linear encoder for ABL15050; 0.1 micron line driver output

High-Accuracy Linear Encoders

Option	Description
-LN05AS	High-accuracy linear encoder for ABL15005; amplified sine output
-LN10AS	High-accuracy linear encoder for ABL15010; amplified sine output
-LN20AS	High-accuracy linear encoder for ABL15020; amplified sine output
-LN30AS	High-accuracy linear encoder for ABL15030; amplified sine output
-LN40AS	High-accuracy linear encoder for ABL15040; amplified sine output
-LN50AS	High-accuracy linear encoder for ABL15050; amplified sine output

Options

Option	Description
-SINGLE-CMS	Cable management system for single-axis applications
-XY-CMS	Cable management system for X-Y assembly

Accessories (to be ordered as separate line item)

Option	Description
HALAR	High-accuracy system linear error correction for accuracy and repeatability
ALIGNMENT-NPA	Non-precision XY assembly
ALIGNMENT-PA10	XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5	XY assembly; 5 arc sec orthogonal