空气轴承转台 | Rotary Air Bearing Stages | 气浮转台
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Rotary Air Bearings with either ceramic servo motors or frameless servo motors.
Rotary Air Bearings Systems are available with ceramic servo motors or frameless rotary servo motors depending on your application needs.
- Many standard models using Professional Instruments and ALIO bearings.
- Custom systems
- Servo Motor or Ceramic Servo Motors
- Class 1 Clean Room compatible
- Standard radial and axial runout less than 1 micron